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What is C-beam
C-beam that stands for Carbon Nanotube-based Cold Cathode Electron Beam is advanced electron source for next generation semiconductor industry. Our lab is researching C-beam fabrication and its applications in semiconductor processing and inspection.
Fabrication of C-beam
Lithography
Electron Source
Modularization
Application of C-beam
X-ray Imaging and 3D Tomosynthesis
X-ray imaging for NDT (Non-Destructive Testing) technology
EUV
EUV (Extreme Ultra Violet) lighting source based on the C-beam irradiation technique
SEM
Advanced Scanning Electron Microscope technology for the Ultra high-resolution imaging
Hole drilling
Hole Drilling technique for fabrication of FMM (Fine Metal Mask) and TSV (Through Silicon Via)
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